Charged particle beam drawing apparatus, format check apparatus and format check method

ABSTRACT

A charged particle beam drawing apparatus in an embodiment includes an information generation part to generate encoded information on drawing data having a layered structure and check information on the format check, if the drawing data passes the check by the format check part; an information storage part to store the encoded information and the check information; a code inspection part to inspect the drawing data by using the encoded information in the information storage part, when the drawing data is to be rechecked in the format check based on the check details; an information inspection part to inspect the check information in the information storage part while omitting the format check, if the drawing data passes the inspection by the code inspection part; and a check execution part to execute check with processing details of the format check changed according to the inspection result.

CROSS-REFERENCE TO THE RELATED APPLICATION

This application is based on and claims the benefit of priority fromJapanese Patent Application No. 2013-95032, filed on Apr. 30, 2013; theentire contents of which are incorporated herein by reference.

FIELD

Embodiments described herein relate generally to a charged particle beamdrawing apparatus, a format check apparatus and a format check method.

BACKGROUND

Along with recent advancement toward higher integration and lagercapacity of large scale integrated circuits (LSI), the circuit linewidth to be achieved by semiconductor devices has become smaller andsmaller. The photolithography technique is used to form desired circuitpatterns in semiconductor devices. In this photolithography technique,pattern transfer is performed using a defined pattern called a photomask(reticle). A charged particle beam drawing apparatus having fineresolution is used to produce highly accurate masks to be used forpattern transfer.

In the charged particle beam drawing apparatus, format check isgenerally performed to check the format of drawing data. This formatcheck is performed on the occasion of data transfer, data copy or thelike. In addition, the format check is sometimes performed on the samedrawing data with different check requirements (check details). Notethat the drawing data is data having a layered structure including achip layer, a frame layer, a block layer, a cell layer and a figurelayer, for example.

In this regard, the data volume of the drawing data having theaforementioned layered structure is so large that the format check ofthe drawing data requires a long period of time. In addition, if a partof the format check is carelessly omitted in order to shorten the checktime, the rigorous check cannot be performed.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram illustrating a schematic configuration of a chargedparticle beam drawing apparatus according to a first embodiment.

FIG. 2 is an explanatory diagram for explaining drawing data accordingto the first embodiment.

FIG. 3 is an explanatory diagram for explaining format check andinformation generation according to the first embodiment.

FIG. 4 is an explanatory diagram for explaining processing details inaccordance with check details according to the first embodiment.

FIG. 5 is a flowchart illustrating a flow of check processing accordingto the first embodiment.

FIG. 6 is an explanatory diagram for explaining an example of an updateof a check information file according to the first embodiment.

FIG. 7 is an explanatory diagram for explaining another example of theformat check and the information generation according to the firstembodiment.

FIG. 8 is an explanatory diagram for explaining another example of theprocessing details in accordance with the check details according to thefirst embodiment.

FIG. 9 is an explanatory diagram for explaining format check andinformation generation according to a second embodiment.

FIG. 10 is an explanatory diagram for explaining processing details inaccordance with check details according to the second embodiment.

FIG. 11 is an explanatory diagram for explaining another example of theformat check and the information generation according to the secondembodiment.

FIG. 12 is an explanatory diagram for explaining another example of theprocessing details in accordance with the check details according to thesecond embodiment.

FIG. 13 is a diagram illustrating a schematic configuration of a patterninspection apparatus according to a third embodiment.

DETAILED DESCRIPTION

According to one embodiment of the present invention, a charged particlebeam drawing apparatus includes: a format check part configured toperform format check based on check details on drawing data having alayered structure; an information generation part configured to generateencoded information on the drawing data and check information on theformat check, if the drawing data passes the check performed by theformat check part; an information storage part configured to store theencoded information and the check information generated by theinformation generation part; a code inspection part configured toinspect the drawing data by using the encoded information stored by theinformation storage part, when the drawing data is to be rechecked inthe format check based on the check details; an information inspectionpart configured to inspect the check information stored by theinformation storage part if the drawing data passes the inspectionperformed by the code inspection part; and a check execution partconfigured to execute check with processing details of the format checkchanged according to an inspection result obtained by the informationinspection part.

According to another embodiment, a format check apparatus includes: aformat check part configured to perform format check based on checkdetails on drawing data having a layered structure; an informationgeneration part configured to generate encoded information on thedrawing data and check information on the format check, if the drawingdata passes the check performed by the format check part; an informationstorage part configured to store the encoded information and the checkinformation generated by the information generation part; a codeinspection part configured to inspect the drawing data by using theencoded information stored by the information storage part, when thedrawing data is to be rechecked in the format check based on the checkdetails; an information inspection part configured to inspect the checkinformation stored by the information storage part if the drawing datapasses the inspection performed by the code inspection part; and a checkexecution part configured to execute check with processing details ofthe format check changed according to an inspection result obtained bythe information inspection part.

According to another embodiment, a format check method includes thesteps of: performing format check based on check details on drawing datahaving a layered structure; generating encoded information on thedrawing data and check information on the format check, if the drawingdata passes the format check; storing the encoded information and thecheck information thus generated; inspecting the drawing data by usingthe stored encoded information when the drawing data is to be recheckedin the format check based on the check details; inspecting the storedcheck information if the drawing data passes the inspection using theencoded information; and executing check with processing details of theformat check changed according to an inspection result of the inspectionon the check information.

Various Embodiments will be described hereinafter with reference to theaccompanying drawings.

First Embodiment

A first embodiment is described with reference to FIGS. 1 to 8.

As illustrated in FIG. 1, a charged particle beam drawing apparatus 1according to the first embodiment includes a drawing unit 2 configuredto perform drawing by using a charged particle beam and a controllingunit 3 configured to control the drawing unit 2. The charged particlebeam drawing apparatus 1 is one example of a variable-shaped beamdrawing apparatus using, for example, an electron beam. It should benoted that the charged particle beam is not limited to the electron beambut may be any other charged particle beam such as an ion beam.

The drawing unit 2 includes a drawing chamber 2 a where to accommodate asample W targeted for drawing, and an optical lens barrel 2 bcommunicating with the drawing chamber 2 a. A stage 11 for supportingthe sample W is provided inside the drawing chamber 2 a. The stage 11 isformed to be movable in an X direction and a Y direction which areorthogonal to each other on a horizontal plane, and has a mountingsurface for mounting a sample W such as a mask or a blank, for example.An electron gun 21 configured to emit an electron beam B, anillumination lens 22 configured to condense the electron beam B, a firstaperture 23 for beam shaping, a projection lens 24 for projection, afirst deflector 25 for beam shaping, a second aperture 26 for beamshaping, an object lens 27 configured to focus the beam on the sample W,and a second deflector 28 configured to control a beam shot position onthe sample W are arranged inside the optical lens barrel 2 b.

In the drawing unit 2, the electron beam B is emitted from the electrongun 21 and is applied to the first aperture 23 via the illumination lens22. The first aperture 23 has an aperture in a rectangular shape, forexample. With this shape, once the electron beam B passes through thefirst aperture 23, the electron beam B is formed to have a rectangularcross sectional shape, and then is projected onto the second aperture 26via the projection lens 24. The projection position can be deflected bythe first deflector 25. The shape and the dimensions of the electronbeam B can be controlled by changing the projection position. Then,after passing through the second aperture 26, the electron beam B isshot on the sample W mounted on the stage 11 with a focus adjudged viathe object lens 27. Here, the shot position of the electron beam B onthe sample W mounted on the stage 11 is controlled by the seconddeflector 28.

The controlling unit 3 includes a drawing data converter 3 a configuredto convert inputted drawing data into data in a format for drawingapparatus, a drawing data storage 3 b configured to store the converteddrawing data, a format check device (apparatus) 3 c configured to checkthe format of the converted drawing data, and a drawing controller 3 dconfigured to control the drawing unit 2 on the basis of the checkeddrawing data.

The drawing data converter 3 a converts drawing data to data in theformat for drawing apparatus, the drawing data obtained by converting,for example, layout data (design data, CAD data, or the like) of asemiconductor integrated circuit or the like. The drawing data isinputted to the drawing data converter 3 a through, for example, a wiredor wireless network from a storage device (not illustrated) such as adatabase where the drawing data is stored.

The drawing data storage 3 b is a storage unit to store the drawing datain the format for drawing apparatus, to which the inputted drawing datais converted by the drawing data converter 3 a. For example, a magneticdisk device, a semiconductor disk device (flash memory) or the like canbe used as the drawing data storage 3 b.

The format check device 3 c reads the drawing data in the format fordrawing apparatus from the drawing data storage 3 b on the occasion ofthe data transfer or the like, and checks the format of the drawing data(the details will be described later). If the drawing data passes thecheck, the format check device 3 c transmits the passed drawing data tothe drawing controller 3 d in the next stage. On the other hand, if thedrawing data fails to pass, the format check device 3 c sets an errorflag (error notification).

The drawing controller 3 d controls the drawing unit 2 on the basis ofthe drawing data in the format for drawing apparatus transmitted fromthe format check device 3 c. To be more specific, on the basis of thedrawing data having passed the check, the drawing controller 3 d drawsfigures at predetermined positions on the sample W mounted on the stage11 by deflecting and shooting the electron beam B onto the predeterminedpositions while moving the stage 11 having the sample W mounted thereonin the X direction, for example. Thereafter the drawing controller 3 dmoves the stage 11 in one step in the Y direction, and then drawsfigures in the same manner as that described above. By repeating theabove operation, the drawing controller 3 d performs the drawing on adrawing region of the sample W by using the electron beam B (one exampleof the drawing operation).

Here, as illustrated in FIG. 2, the foregoing drawing data is layered ina chip layer CP, a frame layer FR lower than the chip layer CP, a blocklayer BL lower than the frame layer FR, a cell layer CL lower than theblock layer BL, and a figure layer FG lower than the cell layer CL(layered structure). Here, both the drawing data before conversion andthe drawing data after conversion have a layered structure. In suchdrawing data, if a certain layer is defined as a first layer, a layerimmediately below the first layer is a second layer, and a layerimmediately below the second layer is a third layer.

In the example of FIG. 2, a chip CP1 being one of elements (chips) inthe chip layer CP corresponds to three frames FR1 to FR3 being part ofelements (frames) of the frame layer FR. In addition, the frame FR2being part of the elements in the frame layer FR corresponds to 18blocks BL1 to BL18 being part of elements (blocks) in the block layerBL. The block BL9 being one of the elements in the block layer BLcorresponds to four cells CL1 to CL4 being part of elements (cells) ofthe cell layer CL. The cell CL1 being part of the elements in the celllayer CL corresponds to plural figures FG1 and FG2 being part ofelements (figures) in the figure layer FG.

Next, the aforementioned format check device 3 c is described in moredetail.

As illustrated in FIG. 1, the format check device 3 c includes a formatcheck part 31 configured to perform format check on drawing data in afirst check, an information generation part 32 configured to generateencoded information on the drawing data having passed the format checkand check information on the format check, an information storage part33 configured to store the encoded information and the check informationthus generated, a code inspection part 34 configured to check the abovedrawing data by using the encoded information in a second or subsequentcheck, an information inspection part 35 to inspect the checkinformation, a check execution part 36 configured to execute check withprocessing details of the format check changed according to theinspection result, and an information update part 37 configured toupdate the check information in the information storage part 33.

In the first format check, as illustrated in FIG. 3, the format checkpart 31 reads data 1 as drawing data from the drawing data storage 3 b,and performs the format check on the data 1 based on check details. Thecheck details set in the first format check include “cell_max≦128”,“cell_level skip” and “0≦data_type≦7”, for example.

As illustrated in FIG. 3, the information generation part 32 acquirescode of the data 1 having passed the check and information on the formatcheck (check details) from the format check part 31, and generates anencoded information file and a check information file of the data 1.

Here, when the data 1 passes the first format check, ““filename”=“code1”” is written as the code of the data 1 in the encodedinformation file, for example. Moreover, in the check information file,“cell_max=“ON””, “cell_level=“OFF”” and “data_type=“ON”” are written as[check item] and “cell_max=128”, “cell_level=non” and “data_type=0-7 (arange of 0 to 7)” are written as [check parameter]. Lastly,“inf_file=“code2”” is written as a code of the check information file inthe encoded information file. Note that “cell_max” is a maximum size ofa cell, “cell_level” is a cell_level (the larger a numeric value, thehigher the level), and “data_type” is a type (kind) of data.

Returning to FIG. 1, the information storage part 33 stores the encodedinformation file and the check information file of the data 1transmitted from the information generation part 32. For example, amagnetic disk device, a semiconductor disk device (flash memory) or thelike can be used as the information storage part 33.

In the second or subsequent format check, the code inspection part 34reads the data 1 as the drawing data from the aforementioned drawingdata storage 3 b, and reads the encoded information file of the data 1from the information storage part 33. Then, the code inspection part 34performs an error inspection of the data 1 (code inspection) by usingthe encoded information file, i.e., inspects whether the value of thedata 1 matches the value of code1 of “file name” in the encodedinformation file. Moreover, the code inspection part 34 also performs anerror inspection (code inspection) of the check information file byusing the encoded information file, i.e., inspects whether the value ofthe check information file matches the value of code2 of “inf_file” inthe encoded information file.

If there is no error in the data 1 and the check information file, i.e.,if the data 1 and the check information file pass the inspection, theformat check on the data 1 (check for all the check items in the checkdetails) is omitted. On the other hand, if the data 1 or the checkinformation file fails to pass the inspection, an error is notified ofand then the format check on the data 1 (check for all the check itemsin the check details) is performed.

If the data 1 and the check information file pass the inspection, theinformation inspection part 35 inspects the check information file todetect a change in the check information file, or more specificallydetect a change in the check details by comparing the check details inthe check information file with current check details (check informationfile inspection). When detecting a change in the check details in thecheck information file, the information inspection part 35 sends thecheck execution part 36 a detection notification of the change andchange information indicating how the check details are changed.

In response to the detection notification from the informationinspection part 35, the check execution part 36 additionally performsthe format check according to the change in the check information file,i.e., the changed check details (check items) on the basis of the changeinformation sent from the information inspection part 35.

The information update part 37 applies the change based on the abovechange information to the check information file, and thereby updatesthe check information file (check information file update). Moreover,the information update part 37 rewrites the code of “inf_file” in theencoded information file, and thereby updates the encoded informationfile (encoded information file update).

Here, in the second or subsequent check, for example as illustrated inFIG. 4, if the check details are not changed, the processing detailsinclude only “1. code inspection” and “2. check information fileinspection”. On the other hand, if a check item is changed (added), morespecifically, if “cell_level” is changed from “skip” to “3”, theprocessing details include not only “1. code inspection”, and “2. checkinformation file inspection”, but also “3. cell_level check”, “4. checkinformation file update” and “5. encoded information file update”. Inaddition, if the check parameter is changed, more specifically, if“cell_max” is changed from “128” to “64”, the processing details includenot only “1. code inspection”, and “2. check information fileinspection”, but also “3. cell_max check”, “4. check information fileupdate” and “5. encoded information file update”. Thus, the processingdetails are changed according to the check details.

In the code inspection described above, whether or not the values of thedata 1 and code1 of “file name” match is inspected. If these valuesmatch, whether or not the values of the check information file and code2of “inf_file” match is inspected. If these values match, whether or nota check item is changed is inspected based on the content of the checkinformation file in the aforementioned check information fileinspection. If there is a check item changed (or added) in the currentcheck, the check for the changed check item is executed. Lastly, thecheck items and check parameters for which the check has been performedare written to the check information file, and thereby the checkinformation file is updated. In response to this update, the code of“inf_file” in the encoded information file is also updated.

Incidentally, the aforementioned parts such as the format check part 31,the information generation part 32, the information storage part 33, thecode inspection part 34, the information inspection part 35, the checkexecution part 36 and the information update part 37 may be configuredof hardware such as electric circuits or software such as a program forexecuting the above functions, or further may be configured of acombination of hardware and software. In addition, the aforementionedcheck processing may be performed in either sequential processing(consecutive processing) or parallel processing. In the foregoingdescription, a pair of an encoded information file and a checkinformation file is generated for one set of drawing data, but this isnot the only way. For example, an encoded information file and a checkinformation file may be generated for each chip in the drawing data.

Next, with reference to FIG. 5, description is provided for a flow ofcheck processing performed by the format check device 3 c describedabove.

As illustrated in FIG. 5, it is judged whether the check is the firstcheck or not (step S1). When it is judged that the check is the firstcheck (YES in step S1), the format check part 31 reads data from thedrawing data storage 3 b and performs the format check on the data (stepS2). Thereafter, whether the data passes the format check or not (stepS3) is checked. If it is judged that the data does not pass the formatcheck, i.e., fails the check (NO in step S3), an error indicating thefailure is notified of (step 4) and then the processing is returned tostep S1. On the other hand, if it is judged that the data passes theformat check (YES in step S3), the information generation part 32generates the encoded information file and the check information file ofthe data, and these files are stored in the information storage part 33(step S5).

Here, for example as illustrated in FIG. 3, assuming that the checkdetails include “cell_max≦128”, “cell_level skip” and “0≦data_type≦7”,code1 of the data 1 is written to the encoded information file if thedata 1 passes the first format check. Moreover, in the check informationfile, “cell_max=“ON””, “cell_level=“OFF”” and “data_type=“ON”” arewritten as [check item] and “cell_max=128”, “cell_level=non” and“data_type=0-7” are written as [check parameter]. Thereafter, code2 ofthe check information file is written to the encoded information file.

If it is judged that the format check is not the first check, i.e., asecond or subsequent check in the aforementioned step S1 (NO in stepS1), the data is read from the drawing data storage 3 b and the checkinformation file is read from the information storage part 33. Then, thecode inspection part 34 performs code inspection on the data and thecheck information file (step S6). After that, whether the data and thecheck information file pass the code inspection or not is judged (stepS7). If it is judged that the data and the check information file do notpass the code inspection, i.e., fail the code inspection (NO in stepS7), and an error indicating the failure is notified of (step S8) andthe processing is returned to step S1. Here, when an error is notifiedof in step S4 or step S8, the format check for all the check items isperformed on the data.

On the other hand, if it is judged that the data and the checkinformation file pass the code inspection in step S7 described above(YES in step S7), the information inspection part 35 inspects the checkinformation file (step S9), and judges whether or not the check detailsare changed (step S10). Thereafter, if it is judged that the checkdetails are not changed (NO in step S10), the processing is returned tostep S1. On the other hand, if it is judged that the check details arechanged (YES in step S10), the check execution part 36 additionallyexecutes the format check only for the changed check items (step S11).Subsequently, the information update part 37 updates both the checkinformation file and the encoded information file (step S12), and theprocessing is returned to step S1.

Here, if a check item is changed (“cell_level” is added) as illustratedin FIG. 4, for example, “cell_level check” is additionally executed.Instead, if a check parameter is changed (“cell_max” is changed),“cell_max check” is additionally executed. Note that, irrespective ofwhether the check details are changed or not, the code inspection andthe check information file inspection are performed. In this way, ifthere is no change in the check details, the format check to check allthe check items can be omitted by execution of the code inspection, andthereby the check time can be reduced. Instead, if there is a change inthe check details, the format check for the changed check item isexecuted while the format check for all the check items is omitted. Thisenables achievement of check time reduction and execution of rigorouscheck. In this way, both the rigorousness of the check and theefficiency of the processing can be both improved together.

As described above, according to the first embodiment, in the case wherethe drawing data is to be rechecked in the format check, the drawingdata is inspected by using the stored encoded information, the storedcheck information is inspected if the drawing data passes theinspection, and then the format check is executed with the processingdetails of the format check changed according to the inspection result.Thus, the format check to check all the check items can be omitted byexecution of the inspection using the encoded information, so that checktime reduction can be achieved. Moreover, since the check is performedwith the processing details of the format check changed according to theinspection result of the check information, the check with theprocessing details according to the inspection result can be executed,so that the rigorous check can be performed. For example, if theinspection of the check information detects a change in the checkinformation, the check corresponding to the change can be performed.Thus, the rigorous check can be achieved.

In the above description, every time the check requirements (checkdetails) are changed, the change is reflected in the check informationfile, and thereby the check information file is updated. However, theprocessing is not limited to this. For example, in the case where thesame data is checked multiple times under different check requirements,the check information file may be updated by employing, as a value ofthe check information file, the value imposing the severest constraintamong the values used in the multiple times of check. In this case, thecheck information file imposing severe check requirements is used andthereby more rigorous check can be achieved.

Here, for example as illustrated in FIG. 6, if the check details arechanged from the first check to the second check, i.e., “cell_max” ischanged from “128” to “64”, and “cell_level” is changed from “skip” to“3”, the check information file is changed such that “cell_level” ischanged from “OFF” to “ON” in the check item, and “cell_max” is changedfrom “128” to “64” and “cell_level” is changed from “non” to “3” in thecheck parameter.

Thereafter, if the check details are changed from the second check tothe third check, i.e., “cell_max” is changed from “64” to “128”, and“cell_level” is changed from “3” to “skip”, the check information fileis supposed to be changed such that “cell_level” is changed from “ON” to“OFF” in the check item and “cell_max” is changed from “64” to “128” and“cell_level” is changed from “3” to “non” in the check parameter.However, since the values imposing the severest constraints are to beemployed, the check information file remains unchanged, so that“cell_level” is still “ON” in the check item and “cell_max” is still“64” and “cell_level” is also still “3” in the check parameter.

Next, another example of the foregoing check processing is described. Inthe foregoing description, the format check device 3 c performs datatransfer to only one drawing unit 2. However, the processing is notlimited to this. Here, description is herein provided for checkprocessing in a case where data transfer is performed to multiple, e.g.,two drawing units 2, for example. In this description, a first one ofthe two drawing units 2 is referred to as “Tool A”, whereas the othersecond drawing unit 2 is referred to as “Tool B”.

In the first check, as illustrated in FIG. 7, the format check part 31reads data 1 from the drawing data storage 3 b and performs the formatcheck based on the check details on the data 1. In the check details inthe first check, “basic_check=“ON””, “Tool A check=“ON”” and “Tool Bcheck=“OFF”” are set as [check item], and “cell_max=128”,“cell_level=512” and the like are set as [check parameter], for example.On the basis of these check details, “basic_check” and “Tool A check”are performed as the check for “Tool A”.

Subsequently, if the data 1 passes the above check, the informationgeneration part 32 generates the encoded information file and the checkinformation file of the data 1. For example, ““file name”=“checksum1””is written as the code of the data 1 in the encoded information file.Moreover, in the check information file, “basic_check=“ON””, “Tool Acheck=“ON”” and “Tool B check=“OFF”” are written as [check item], and“cell_max=128”, “cell_level=512” and the like are written as [checkparameter]. Lastly, in the encoded information file,““inf_file”=“checksum2”” is written as the code of the check informationfile.

Thereafter, in the second or subsequent check, for example asillustrated in FIG. 8, if the check details are not changed (in the caseof data transfer to the first drawing unit), the processing detailsinclude “1. code inspection” and “2. check information file inspection”only. On the other hand, if the check items are changed (in the case ofdata transfer to the second drawing unit), i.e., if “Tool A check” ischanged from “ON” to “OFF” and “Tool B check” is changed from “OFF” to“ON”, the processing details include not only “1. code inspection” and“2. check information file inspection” but also “3. Tool B check”, “4.check information file update” and “5. encoded information file update”.

In the code inspection described above, whether or not the values of thedata 1 and “checksum1” match is inspected. If these values match,whether or not the values of the check information file and “checksum2”match is inspected. If these values match, the check information fileinspection is performed to inspect whether or not “basic_check” isperformed from the content of the check information file. If it isjudged that the check is performed, “Tool B check” is additionallyperformed as check for “Tool B”. Then, “Tool B check=“ON”” is written inthe check information file, and thereby the check information file isupdated. In response to this update, the code of “inf_file” in theencoded information file is also updated. In this way, if the checkdetails are changed, the format check for the changed check item isperformed while the format check to check all the check items isomitted. This enables achievement of check time reduction and executionof rigorous check.

Second Embodiment

A second embodiment is described with reference to FIGS. 9 to 12.

The second embodiment is basically the same as the first embodiment. Inthe second embodiment, points different from those in the firstembodiment are described while the same units and parts as thosedescribed in the first embodiment are indicated by the same referencesigns and the description thereof is omitted herein.

In the second embodiment, as the check information of data having passedthe format check, the information generation part 32 does not generatethe information on check details such as check items and checkparameters, but generates check-targeted information by the formatcheck, i.e., actual check-targeted information in data 1. Theinformation storage part 33 stores the check-targeted information by theformat check. The information inspection part 35 detects whether thecheck-targeted information is present or not in the information storagepart 33. When the information inspection part 35 detects the presence ofthe check-targeted information, the check execution part 36 uses thecheck-targeted information stored in the information storage part 33 toexecute check corresponding to the check-targeted information, i.e.,check for a check item whose check-targeted information is present. Onthe other hand, when the information inspection part 35 does not detectthe presence of the check-targeted information, the check execution part36 executes the format check on the data 1 in a usual manner for a checkitem whose check-targeted information is not present.

Here, for example as illustrated in FIG. 9, in the first check, theformat check part 31 reads the data 1 from the drawing data storage 3 b,and performs the format check based on the check details on the data 1.The check details set in the first check include “cell_max≦128”,“cell_level skip” and “0≦data_type≦7”, for example.

Then, if the data 1 passes the above check, the information generationpart 32 generates the encoded information file and the check informationfile of the data 1. For example, when the data 1 passes the first formatcheck, ““file name”=“code1”” is written as the code of the data 1 in theencoded information file. In addition, in the check information file,“cell_max=100”, “cell_level=non” and “data_type=1, 2” are written as[check-targeted information]. These pieces of information arecheck-targeted information obtained in the first format check, andinclude information such as 100 which is a cell maximum value containedin the data 1 and 1, 2 which are actual values contained in the data 1.Lastly, in the encoded information file, ““inf_file”=“code2”” is writtenas the code of the check information file.

Thereafter, in the second or subsequent check, for example asillustrated in FIG. 10, if the check details are not changed, theprocessing details include only “1. code inspection” and “2. checkinformation file inspection”. On the other hand, if a check item ischanged (added), more specifically, if “cell_level” is changed from“skip” to “3”, the processing details include not only “1. codeinspection” and “2. check information file inspection”, but also “3.cell_level check”, “4. check information file update” and “5. encodedinformation file update”. In addition, if the check parameter ischanged, more specifically, if “cell_max” is changed from “128” to “64”,the processing details include not only “1. code inspection” and “2.check information file inspection”, but also “3. cell_max check”. Thus,the processing details are changed according to the check details.

In the code inspection described above, whether or not the values of thedata 1 and code1 of “file name” match is inspected. If these valuesmatch, whether or not the values of the check information file and code2of “inf_file” match is inspected. If these values match, the checkinformation file inspection is performed to inspect whether or not thecheck-targeted information is present for the current check based on thecontent of the check information file. If the presence is detected, thecheck is performed by using the existing check-targeted information. Achange in the check details can be recognized by detecting the presenceor absence of the check-targeted information. Note that check on thedata 1 for a check item whose check-targeted information is not presentis performed in the usual manner. Lastly, the check item for which thecheck has been performed by reading the data 1 is additionally writtenas the check-targeted information to the check information file, and thecode of “inf_file” in the encoded information file is also updated.

In “cell_level check” mentioned above, the check on the data 1 isperformed based on “cell_level≦3” because “cell_level=non” is writtenfor cell_level in the check information file (see FIG. 9) and thecheck-targeted information of cell_level is not present. In addition, in“cell_max check” mentioned above, the check is performed by using theactual check-targeted information instead of the original information ofthe data 1 because “cell_max=100” is written for cell_max in the checkinformation file (see FIG. 9) and the check-targeted information ofcell_max is present. Here, the check details indicate “cell_max≦64”while the check-targeted information in the check information fileindicates “cell_max=100”. In this case, since “cell_max” is larger than64, the data 1 fails the check and an error flag is set (errornotification). This check is performed by not using the originalinformation of the data 1 (for example, binary data) but using theactual check-targeted information in the check information file (forexample, text data), and therefore the processing time can be reduced incomparison with the case where check is performed by using the originalinformation of the drawing data (such as a case where the processing isperformed by reading the binary data).

As described above, the second embodiment can produce the same effectsas the foregoing first embodiment, and therefore can achieve check timereduction and rigorous check. In addition, since the actualcheck-targeted information is used to execute the check corresponding tothe check-targeted information, the processing time can be reduced ascompared with a case where the original information of the drawing datais used, such as a case where the processing is performed by reading thebinary data, for example.

Here, another example of the foregoing check processing is described. Inthe above description, the data type in the check details is set to“0≦data_type≦7”, but is not limited to this. Here, description isprovided for the check processing using a file (text file) specifying arange of data type.

In the first check, as illustrated in FIG. 11, the format check part 31reads data 1 from the drawing data storage 3 b, and performs the formatcheck based on the check details on the data 1. As the check details inthis check, for example, “cell_max≦128”, “cell_level skip” and“aux_check execute” are set, and additionally an aux.xml file isinputted. This file defines a range of data_type of the data 1. Based onthese check details, “aux_check” is executed to check the data 1 and theaux.xml file.

Subsequently, if the data 1 and the aux.xml file pass the above check,the information generation part 32 generates the encoded informationfile and the check information file. For example, when the data 1 passesthe first format check, the encoded information file is generated inwhich ““file name”=“checksum1”” is written as the code of the data 1 and“aux=“checksum2”” is additionally written as the code of the aux.xmlfile. Further, “cell_max=100”, “cell_level=non” and “data_type=1, 2” arewritten as [check-targeted information] in the check information file.These pieces of information are check-targeted information obtained inthe first format check, and include information such as 100 which is acell maximum value contained in the data 1 and 1, 2 which are actualvalues contained in the data 1. Lastly, in the encoded information file,““inf_file”=“checksum3”” is written as the code of the check informationfile.

Thereafter, in the second or subsequent check, for example asillustrated in FIG. 12, if the check details are not changed, theprocessing details include only “1. code inspection” and “2. checkinformation file inspection”. On the other hand, if a check parameter ischanged, i.e., if the aux.xml file is changed, the processing detailsinclude not only “1. code inspection” and “2. check information fileinspection”, but also “3. aux_check check”, “4. check information fileupdate” and “5. encoded information file update”.

In the code inspection described above, whether or not the values of thedata 1 and “checksum1” match and whether or not the values of theaux.xml file and “checksum2” match are inspected. If the values of thedata 1 and “checksum1” match but the values of the aux.xml file and“checksum2” do not match, whether or not the values of the checkinformation file and “checksum3” match is inspected. If these valuesmatch, the check information file inspection is performed to judgewhether or not “data_type” is written in the check information file onthe basis of the content of the check information file. If it is judgedthat “data_type” is written, “aux_check” based on the written“data_type” is executed. If the data 1 passes this check, the code of“aux” in the encoded information file is updated.

In “aux_check” mentioned above, since the check information file (seeFIG. 11) contains “data_type=1, 2” and thus the check-targetedinformation is present, the check is executed by using the actualcheck-targeted information instead of the original information in thedata 1. Here, the check is executed by comparing the numeric values 1and 2 of “data_type” with the range of data_type defined in the aux.xmlfile. This makes it possible to reduce the processing time in comparisonwith a case where the original information in the drawing data is used,for example, a case where the processing needs to be performed byreading the binary data.

Third Embodiment

A third embodiment is described with reference to FIG. 13.

A pattern inspection apparatus according to a third embodiment includesthe format check device in the first embodiment. In the thirdembodiment, points different from those in the first embodiment aredescribed while the same units and parts as those described in the firstembodiment are indicated by the same reference signs and the descriptionthereof is omitted. Note that, the format check device in the secondembodiment may be used in place of the format check device of the firstembodiment.

As illustrated in FIG. 13, a pattern inspection apparatus 51 accordingto the third embodiment includes the format check device 3 c of thefirst embodiment, and a pattern inspection unit 52 configured to inspectpatterns. The format check device 3 c receives input of first data(drawing data) obtained by converting layout data (design data, CAD dataor the like) of a semiconductor integrated circuit or the like, forexample. The pattern inspection unit 52 receives input of the first datahaving passed the format check performed by the format check device 3 c,and input of second data (drawing data) generated based on a patternthat the charged particle beam drawing apparatus 1 has actually drawn ona sample W.

The first data is inputted to the format check device 3 c through awired or wireless network from a storage device (not illustrated) suchas a database where the first data is stored, and then is inputted tothe pattern inspection unit 52 after passing the format check. In asimilar manner, the second data is also inputted to the patterninspection unit 52 through a wired or wireless network from a storagedevice (not illustrated) such as a database where the second data isstored. Like the drawing data in the first embodiment, these first andsecond data also have a layered structure including, for example, a chiplayer CP, a frame layer FR, a block layer BL, a cell layer CL and afigure layer FG (see FIG. 2).

The format check device 3 c checks the format of the inputted first datain the same way as the first embodiment. Here, if the first data passesthe check, the format check device 3 c sends the passed first data tothe pattern inspection unit 52 in the next stage. On the other hand, ifthe first data fails, the format check device 3 c sets an error flag(error notification).

The pattern inspection unit 52 inspects the pattern or the like actuallydrawn on the sample W by the charged particle beam drawing apparatus 1,on the basis of the inputted first and second data. This inspection isperformed by, for example, comparing the pattern actually drawn and thedrawing data converted from the layout data.

As described above, the third embodiment can produce the same effects asthose in the foregoing first embodiment, and therefore can achieve checktime reduction and rigorous check. In addition, if the format checkdevice 3 c in the second embodiment is used in place of the format checkdevice 3 c in the first embodiment, the third embodiment can produce thesame effects as those in the second embodiment.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modifications as would fall within the scope andspirit of the inventions.

What is claimed is:
 1. A charged particle beam drawing apparatuscomprising: a format check part configured to perform format check basedon check details on drawing data having a layered structure; aninformation generation part configured to generate encoded informationon the drawing data and check information on the format check, if thedrawing data passes the check performed by the format check part; aninformation storage part configured to store the encoded information andthe check information generated by the information generation part; acode inspection part configured to inspect the drawing data by using theencoded information stored by the information storage part, when thedrawing data is to be rechecked in the format check based on the checkdetails; an information inspection part configured to inspect the checkinformation stored by the information storage part if the drawing datapasses the inspection performed by the code inspection part; and a checkexecution part configured to execute check with processing details ofthe format check changed according to an inspection result obtained bythe information inspection part.
 2. The charged particle beam drawingapparatus according to claim 1, wherein the information generation partgenerates, as the check information, check information on the checkdetails, and if the information inspection part detects a change in thecheck information, the check execution part executes check correspondingto the change in the check information.
 3. The charged particle beamdrawing apparatus according to claim 1, wherein the informationgeneration part generates, as the check information, check-targetedinformation obtained in the format check, if the information inspectionpart detects the presence of the check-targeted information, the checkexecution part uses the check-targeted information stored by theinformation storage part to execute check corresponding to thecheck-targeted information.
 4. The charged particle beam drawingapparatus according to claim 2, further comprising an information updatepart configured to, if the information inspection part detects a changein the check information, reflect the change in the check information inthe check information stored by the information storage part, andthereby update the check information stored by the information storagepart.
 5. The charged particle beam drawing apparatus according to claim3, further comprising an information update part configured to, if theinformation inspection part detects a change in the check information,reflect the change in the check information in the check informationstored by the information storage part, and thereby update the checkinformation stored by the information storage part.
 6. The chargedparticle beam drawing apparatus according to claim 4, wherein inresponse to an update of the check information, the information updatepart updates the encoded information stored by the information storagepart.
 7. The charged particle beam drawing apparatus according to claim5, wherein in response to an update of the check information, theinformation update part updates the encoded information stored by theinformation storage part.
 8. A format check apparatus comprising: aformat check part configured to perform format check based on checkdetails on drawing data having a layered structure; an informationgeneration part configured to generate encoded information on thedrawing data and check information on the format check, if the drawingdata passes the check performed by the format check part; an informationstorage part configured to store the encoded information and the checkinformation generated by the information generation part; a codeinspection part configured to inspect the drawing data by using theencoded information stored by the information storage part, when thedrawing data is to be rechecked in the format check based on the checkdetails; an information inspection part configured to inspect the checkinformation stored by the information storage part if the drawing datapasses the inspection performed by the code inspection part; and a checkexecution part configured to execute check with processing details ofthe format check changed according to an inspection result obtained bythe information inspection part.
 9. The format check apparatus accordingto claim 8, wherein the information generation part generates, as thecheck information, check information on the check details, and if theinformation inspection part detects a change in the check information,the check execution part executes check corresponding to the change inthe check information.
 10. The format check apparatus according to claim8, wherein the information generation part generates, as the checkinformation, check-targeted information obtained in the format check, ifthe information inspection part detects the presence of thecheck-targeted information, the check execution part uses thecheck-targeted information stored by the information storage part toexecute check corresponding to the check-targeted information.
 11. Theformat check apparatus according to claim 9, further comprising aninformation update part configured to, if the information inspectionpart detects a change in the check information, reflect the change inthe check information in the check information stored by the informationstorage part, and thereby update the check information stored by theinformation storage part.
 12. The format check apparatus according toclaim 10, further comprising an information update part configured to,if the information inspection part detects a change in the checkinformation, reflect the change in the check information in the checkinformation stored by the information storage part, and thereby updatethe check information stored by the information storage part.
 13. Theformat check apparatus according to claim 11, wherein in response to anupdate of the check information, the information update part updates theencoded information stored by the information storage part.
 14. Theformat check apparatus according to claim 12, wherein in response to anupdate of the check information, the information update part updates theencoded information stored by the information storage part.
 15. A formatcheck method comprising the steps of: performing format check based oncheck details on drawing data having a layered structure; generatingencoded information on the drawing data and check information on theformat check, if the drawing data passes the format check; storing theencoded information and the check information thus generated; inspectingthe drawing data by using the stored encoded information when thedrawing data is to be rechecked in the format check based on the checkdetails; inspecting the stored check information if the drawing datapasses the inspection using the encoded information; and executing checkwith processing details of the format check changed according to aninspection result of the inspection on the check information.
 16. Theformat check method according to claim 15, wherein the check informationgenerated in the step of generating the check information is checkinformation on the check details, and if a change in the checkinformation is detected in the step of inspecting the check information,check corresponding to the change in the check information is executedin the step of executing the check with the processing details changed.17. The format check method according to claim 15, wherein the checkinformation generated in the step of generating the check information ischeck-targeted information obtained in the format check, if the presenceof the check-targeted information is detected in the step of inspectingthe check information, the stored check-targeted information is used toexecute check corresponding to the check-targeted information in thestep of executing the check with the processing details changed.
 18. Theformat check method according to claim 16, further comprising the stepof, if a change in the check information is detected in the step ofinspecting the check information, updating the stored check informationby reflecting the change in the check information in the stored checkinformation.
 19. The format check method according to claim 17, furthercomprising the step of, if a change in the check information is detectedin the step of inspecting the check information, updating the storedcheck information by reflecting the change in the check information inthe stored check information.
 20. The format check method according toclaim 18, wherein in the step of updating the check information, thestored encoded information is updated in response to an update of thecheck information.